Development of motorized plasma lithography for cell patterning

Shinji Deguchi, Yohei Nagasawa, Akira C. Saito, Tsubasa S. Matsui, Sho Yokoyama, Masaaki Sato

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)


The micropatterning of cells, which restricts the adhesive regions on the substrate and thus controls cell geometry, is used to study mechanobiology-related cell functions. Plasma lithography is a means of providing such patterns and uses a spatially-selective plasma treatment. Conventional plasma lithography employs a positionally-fixed mask with which the geometry of the patterns is determined and thus is not suited for producing on-demand geometries of patterns. To overcome this, we have manufactured a new device with a motorized mask mounted in a vacuum chamber of a plasma generator, which we designate motorized plasma lithography. Our pilot tests indicate that various pattern geometries can be obtained with the control of a shielding mask during plasma treatment. Our approach can thus omit the laborious process of preparing photolithographically microfabricated masks required for the conventional plasma lithography.

Original languageEnglish
Pages (from-to)507-513
Number of pages7
JournalBiotechnology Letters
Issue number3
Publication statusPublished - 2014 Mar


  • Cell micropatterning
  • MEMS-free patterning
  • Mechanobiology
  • Micropatterns
  • Plasma lithography

ASJC Scopus subject areas

  • Biotechnology
  • Bioengineering
  • Applied Microbiology and Biotechnology


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