Development of monolithic PZT microstage for the application of ultra high-density data storage

H. G. Xu, K. Okamoto, D. Y. Zhang, T. Ono, M. Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

This paper presents the fabrication and characterizations of a compact PZT actuated microstage with multi degrees of freedom (DOFs). The entire device is fabricated in a symmetrically arrangement from a monolithic PZT plate with a size of 15×15×0.8 mm 3. Displacement amplification mechanisms are integrated in the structure to increase the stroke of PZT actuators. The performances of the displacement and the resonant frequencies are simulated using a finite element method (FEM). Simulation results show the possibility of achieving a displacement of 8 μm in x- and y-axes and 10 μm in z-axis under the applied voltage of 100 V. A prototype has been fabricated and evaluated. Comparisons between FEM simulation and experimental results are carried out.

Original languageEnglish
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages717-720
Number of pages4
DOIs
Publication statusPublished - 2005 Nov 9
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: 2005 Jun 52005 Jun 9

Publication series

NameDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume1

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period05/6/505/6/9

Keywords

  • Bimorph
  • Data storage
  • FEM
  • Microstage
  • PZT

ASJC Scopus subject areas

  • Engineering(all)

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