A miniaturized electron probe X-ray microanalyzer (EPMA) with a small chamber including the electron source and the sample stage was realized using a pyroelectric crystal as an electron source. The EPMA we propose is the smallest reported so far. Performance of the EPMA was evaluated by investigating energy of obtained continuous X-rays and lower detection limits of transition metals (titanium, iron, and nickel). End point energy (Duane-Hunt limit) of continuous X-rays of 45 keV was obtained. However, it is expected that the EPMA can analyze characteristic X-rays with energy less than 20 keV. The EPMA was able to measure titanium, iron, and nickel wires whose projected areas were more than 0.03 mm2.
ASJC Scopus subject areas
- Analytical Chemistry