Development of miniaturized electron probe x-ray microanalyzer

Susumu Imashuku, Akira Imanishi, Jun Kawai

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)


A miniaturized electron probe X-ray microanalyzer (EPMA) with a small chamber including the electron source and the sample stage was realized using a pyroelectric crystal as an electron source. The EPMA we propose is the smallest reported so far. Performance of the EPMA was evaluated by investigating energy of obtained continuous X-rays and lower detection limits of transition metals (titanium, iron, and nickel). End point energy (Duane-Hunt limit) of continuous X-rays of 45 keV was obtained. However, it is expected that the EPMA can analyze characteristic X-rays with energy less than 20 keV. The EPMA was able to measure titanium, iron, and nickel wires whose projected areas were more than 0.03 mm2.

Original languageEnglish
Pages (from-to)8363-8365
Number of pages3
JournalAnalytical Chemistry
Issue number22
Publication statusPublished - 2011 Nov 15
Externally publishedYes

ASJC Scopus subject areas

  • Analytical Chemistry


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