@article{1c2c25ec943a46b785ccda267f66a8f7,
title = "Development of micro/nano engineering",
keywords = "MEMS, Micro machining, NEMS, Nano technology",
author = "Hiroki Kuwano",
note = "Copyright: Copyright 2018 Elsevier B.V., All rights reserved.",
year = "2010",
month = aug,
doi = "10.1299/kikaic.76.1882",
language = "English",
volume = "76",
pages = "1882--1886",
journal = "Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C",
issn = "0387-5024",
publisher = "Japan Society of Mechanical Engineers",
number = "768",
}