Development of micro/nano engineering

Research output: Contribution to journalReview articlepeer-review

Original languageEnglish
Pages (from-to)1882-1886
Number of pages5
JournalNihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
Volume76
Issue number768
DOIs
Publication statusPublished - 2010 Aug

Keywords

  • MEMS
  • Micro machining
  • NEMS
  • Nano technology

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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