Development of micro/nano engineering

Hiroki Kuwano

doi:10.1299/kikaic.76.1882

Development of micro/nano engineering

New Industry Creation Hatchery Center (NICHe)

Research output: Contribution to journal › Review article › peer-review

Original language	English
Pages (from-to)	1882-1886
Number of pages	5
Journal	Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
Volume	76
Issue number	768
DOIs	https://doi.org/10.1299/kikaic.76.1882
Publication status	Published - 2010 Aug

Keywords

MEMS
Micro machining
NEMS
Nano technology

ASJC Scopus subject areas

Mechanics of Materials
Mechanical Engineering
Industrial and Manufacturing Engineering

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10.1299/kikaic.76.1882

Cite this

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title = "Development of micro/nano engineering",

keywords = "MEMS, Micro machining, NEMS, Nano technology",

author = "Hiroki Kuwano",

year = "2010",

month = aug,

doi = "10.1299/kikaic.76.1882",

language = "English",

volume = "76",

pages = "1882--1886",

journal = "Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C",

issn = "0387-5024",

publisher = "Japan Society of Mechanical Engineers",

number = "768",

}

TY - JOUR

T1 - Development of micro/nano engineering

AU - Kuwano, Hiroki

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KW - MEMS

KW - Micro machining

KW - NEMS

KW - Nano technology

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DO - 10.1299/kikaic.76.1882

M3 - Review article

AN - SCOPUS:78349294171

VL - 76

SP - 1882

EP - 1886

JO - Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C

JF - Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C

SN - 0387-5024

IS - 768

ER -

Development of micro/nano engineering

Keywords

ASJC Scopus subject areas

Access to Document

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