Development of micro-beam NRA for 3D-mapping of hydrogen distribution in solids: Application of tapered glass capillary to 6 MeV 15N ion

D. Sekiba, H. Yonemura, T. Nebiki, M. Wilde, S. Ogura, H. Yamashita, M. Matsumoto, J. Kasagi, Y. Iwamura, T. Itoh, H. Matsuzaki, T. Narusawa, K. Fukutani

Research output: Contribution to journalArticlepeer-review

27 Citations (Scopus)

Abstract

A micro-beam NRA system, by means of a resonant nuclear reaction 1H(15N, αγ)12C, has been developed for the purpose of the 3D mapping of the hydrogen distribution in solids. To obtain the tens μm size of the beam spot, the combination of the newly proposed tapered glass capillary and a conventional quadrupole magnetic lens is employed. An Y patterned film on a substrate is prepared as an application of the developed system. The 6 MeV 15N beam focused by glass capillaries down to 50 μm successfully shows the hydrogen distribution. The in-plane NRA profile implies that the beam emitted from the glass capillary outlet is parallel, although the original beam has a considerable divergence. The NRA measurements in the 103 Pa N2 atmosphere due to the low gas conductance of the glass capillary is also demonstrated.

Original languageEnglish
Pages (from-to)4027-4036
Number of pages10
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume266
Issue number18
DOIs
Publication statusPublished - 2008 Sep 1
Externally publishedYes

Keywords

  • Glass capillary
  • Heavy ion
  • Hydrogen detection
  • Ion beam focusing
  • Micro-beam
  • NRA

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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