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Development of MEMS pierce-type nanocrystalline Si electron-emitter array for massively parallel electron beam direct writing
Hitoshi Nishino, Shinya Yoshida, Akira Kojima, Naokatsu Ikegami, Nobuyoshi Koshida, Shuji Tanaka, Masayoshi Esashi
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
7
Citations
(Scopus)