Development of MEMS capacitive sensor using a MOSFET structure

Hayato Izumi, Yohei Matsumoto, Seiji Aoyagi, Yusaku Harada, Shoso Shingubara, Minoru Sasaki, Kazuhiro Hane, Hiroshi Tokunaga

Research output: Contribution to journalArticle

1 Citation (Scopus)

Fingerprint Dive into the research topics of 'Development of MEMS capacitive sensor using a MOSFET structure'. Together they form a unique fingerprint.

Engineering & Materials Science