Development of Mechanically-Robust Piezoelectric Micromachined Ultrasonic Transducer (pMUT) with Island-Shaped PZT Monocrystalline Thin Film

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this study, we developed a mechanically-robust piezoelectric micromachined ultrasonic transducer (pMUT) based on a monocrystalline Pb(Zr, Ti)O3 thin film (Mono-PZT). Mono-PZT has a high value of figure of merit (FOM) for pMUT. However, the mechanical fracture is often caused for a conventional-design pMUT during the resonant driving with a large displacement. That is perhaps due to its brittle property. For overcoming this problem, we proposed a new design: island-shaped Mono-PZT structure covered with a ring-shaped polyimide thin film. The fracture test proved that this design is effective for enhancing the mechanical robustness. This achievement has a great potential to create not only a higher-performance but also highly-reliable pMUT.

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages833-836
Number of pages4
ISBN (Electronic)9781728120072
DOIs
Publication statusPublished - 2019 Jun
Event20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
Duration: 2019 Jun 232019 Jun 27

Publication series

Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
CountryGermany
CityBerlin
Period19/6/2319/6/27

Keywords

  • mechanical robustness
  • monocrystalline thin film PZT
  • pMUT

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Spectroscopy
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation

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