Development of maskless electron-beam lithography using nc-Si electron-emitter array

A. Kojima, N. Ikegami, T. Yoshida, H. Miyaguchi, M. Muroyama, H. Nishino, S. Yoshida, M. Sugata, S. Cakir, H. Ohyi, N. Koshida, M. Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

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