Development of high-throughput combinatorial terahertz time-domain spectrometer and its application to ternary composition-spread film

M. Ohtani, T. Hitosugi, Y. Hirose, J. Nishimura, A. Ohtomo, M. Kawasaki, R. Inoue, M. Tonouchi, T. Shimada, T. Hasegawa

    Research output: Contribution to journalConference articlepeer-review

    5 Citations (Scopus)

    Abstract

    We have developed a high-throughput combinatorial terahertz (THz) time-domain spectrometer (CTTDS) and applied to a ternary composition-spread film. This technique has possibilities to reveal a variety of physical properties such as complex refractive index, complex dielectric constant, and complex electrical conductivity. Further, this method is a non-contact and non-destructive way to map those physical properties. The demonstration of THz transmittance mapping of ternary composition-spread film, with a spatial resolution of 1 mm, reveals metallic behavior in specific range of film compositions. This prospective technique may serve as a convenient tool for the high-throughput, non-contact, non-destructive, and spatially resolved characterization suited for combinatorial composition-spread films.

    Original languageEnglish
    Pages (from-to)2622-2627
    Number of pages6
    JournalApplied Surface Science
    Volume252
    Issue number7
    DOIs
    Publication statusPublished - 2006 Jan 21
    EventProceedings of the Third Japan-US Workshop on Combinatorial Material Science and Technology CMST-e SI -
    Duration: 2004 Dec 72004 Dec 10

    Keywords

    • Combinatorial
    • Complex refractive index
    • High-throughput
    • Terahertz

    ASJC Scopus subject areas

    • Chemistry(all)
    • Condensed Matter Physics
    • Physics and Astronomy(all)
    • Surfaces and Interfaces
    • Surfaces, Coatings and Films

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