Development of high-throughput combinatorial terahertz time-domain spectrometer and its application to ternary composition-spread film

M. Ohtani; T. Hitosugi; Y. Hirose; J. Nishimura; A. Ohtomo; M. Kawasaki; R. Inoue; M. Tonouchi; T. Shimada; T. Hasegawa

doi:10.1016/j.apsusc.2005.06.039

Development of high-throughput combinatorial terahertz time-domain spectrometer and its application to ternary composition-spread film

M. Ohtani, T. Hitosugi, Y. Hirose, J. Nishimura, A. Ohtomo, M. Kawasaki, R. Inoue, M. Tonouchi, T. Shimada, T. Hasegawa

Research output: Contribution to journal › Conference article › peer-review

5 Citations (Scopus)

Abstract

We have developed a high-throughput combinatorial terahertz (THz) time-domain spectrometer (CTTDS) and applied to a ternary composition-spread film. This technique has possibilities to reveal a variety of physical properties such as complex refractive index, complex dielectric constant, and complex electrical conductivity. Further, this method is a non-contact and non-destructive way to map those physical properties. The demonstration of THz transmittance mapping of ternary composition-spread film, with a spatial resolution of 1 mm, reveals metallic behavior in specific range of film compositions. This prospective technique may serve as a convenient tool for the high-throughput, non-contact, non-destructive, and spatially resolved characterization suited for combinatorial composition-spread films.

Original language	English
Pages (from-to)	2622-2627
Number of pages	6
Journal	Applied Surface Science
Volume	252
Issue number	7
DOIs	https://doi.org/10.1016/j.apsusc.2005.06.039
Publication status	Published - 2006 Jan 21
Event	Proceedings of the Third Japan-US Workshop on Combinatorial Material Science and Technology CMST-e SI - Duration: 2004 Dec 7 → 2004 Dec 10

Keywords

Combinatorial
Complex refractive index
High-throughput
Terahertz

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Physics and Astronomy(all)
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1016/j.apsusc.2005.06.039

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Development of high-throughput combinatorial terahertz time-domain spectrometer and its application to ternary composition-spread film. / Ohtani, M.; Hitosugi, T.; Hirose, Y.; Nishimura, J.; Ohtomo, A.; Kawasaki, M.; Inoue, R.; Tonouchi, M.; Shimada, T.; Hasegawa, T.

In: Applied Surface Science, Vol. 252, No. 7, 21.01.2006, p. 2622-2627.

Research output: Contribution to journal › Conference article › peer-review

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abstract = "We have developed a high-throughput combinatorial terahertz (THz) time-domain spectrometer (CTTDS) and applied to a ternary composition-spread film. This technique has possibilities to reveal a variety of physical properties such as complex refractive index, complex dielectric constant, and complex electrical conductivity. Further, this method is a non-contact and non-destructive way to map those physical properties. The demonstration of THz transmittance mapping of ternary composition-spread film, with a spatial resolution of 1 mm, reveals metallic behavior in specific range of film compositions. This prospective technique may serve as a convenient tool for the high-throughput, non-contact, non-destructive, and spatially resolved characterization suited for combinatorial composition-spread films.",

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AU - Ohtani, M.

AU - Hitosugi, T.

AU - Hirose, Y.

AU - Nishimura, J.

AU - Ohtomo, A.

AU - Kawasaki, M.

AU - Inoue, R.

AU - Tonouchi, M.

AU - Shimada, T.

AU - Hasegawa, T.

PY - 2006/1/21

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AB - We have developed a high-throughput combinatorial terahertz (THz) time-domain spectrometer (CTTDS) and applied to a ternary composition-spread film. This technique has possibilities to reveal a variety of physical properties such as complex refractive index, complex dielectric constant, and complex electrical conductivity. Further, this method is a non-contact and non-destructive way to map those physical properties. The demonstration of THz transmittance mapping of ternary composition-spread film, with a spatial resolution of 1 mm, reveals metallic behavior in specific range of film compositions. This prospective technique may serve as a convenient tool for the high-throughput, non-contact, non-destructive, and spatially resolved characterization suited for combinatorial composition-spread films.

KW - Combinatorial

KW - Complex refractive index

KW - High-throughput

KW - Terahertz

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T2 - Proceedings of the Third Japan-US Workshop on Combinatorial Material Science and Technology CMST-e SI

Y2 - 7 December 2004 through 10 December 2004

ER -

Development of high-throughput combinatorial terahertz time-domain spectrometer and its application to ternary composition-spread film

Abstract

Keywords

ASJC Scopus subject areas

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