Development of high-resolution and light-weight x-ray optics with deformed silicon wafers

Yuichiro Ezoe, Takayuki Shirata, Takaya Ohashi, Manabu Ishida, Kazuhisa Mitsuda, Kozo Fujiwara, Kohei Morishita, Kazuo Nakajima

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)


We report on our development of hot plastic deformation of silicon wafer for high-resolution and light-weight X-ray optics. The highly polished silicon wafer with an excellent flat surface is a promising candidate for the next generation space X-ray telescopes. Deformation accuracy and stability, especially if elastic deformation is used, are issues. The hot plastic deformation of the silicon wafer allows us 3-dimensional shaping without spring back after the deformation. As a first step of R & D, we conducted the hot plastic deformation of 4-inch silicon (111) wafers with a thickness of 300 μm by using hemispherical dies with a curvature radius of 1000 mm. The deformed wafer kept good surface quality but showed a slightly large curvature of 1030 mm. We measured the X-ray reflectivity of the deformed wafer at Al K α 1.49 keV. For the first time, we detected the total X-ray reflection on the deformed wafer. Estimated rms surface roughness was 0-1 nm and no significant degradation from the bare silicon wafers was seen.

Original languageEnglish
Title of host publicationEUV and X-Ray Optics
Subtitle of host publicationSynergy between Laboratory and Space
Publication statusPublished - 2009 Sep 14
EventEUV and X-Ray Optics: Synergy between Laboratory and Space - Prague, Czech Republic
Duration: 2009 Apr 202009 Apr 22

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherEUV and X-Ray Optics: Synergy between Laboratory and Space
CountryCzech Republic


  • Hot plastic deformation
  • Silicon wafer
  • X-ray astronomy
  • X-ray mirror

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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