Development of high-quality graphene nano-ribbon fabrication process for high sensitivity strain sensor

Ryohei Nakagawa, Ken Suzuki, Hideo Miura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A strain sensor having large deformability and high sensitivity is strongly demanded. In order to fabricate a sensing part of a next generation strain sensor, graphene nanoribbon (GNR) fabrication process was developed. It was predicted that GNR has high strain sensitivity based on piezoresistivitve effect when its width is less than 70 nm. In this study, top-down approach was applied to fabricate the GNR. At first, in order to synthesize a high-quality graphene sheet, acetylene-based LPCVD (low pressure chemical vapor deposition) using Cu foil was developed. After the synthesis, a graphene sheet was transferred onto a Si/SiO2 substrate and the quality of the transferred graphene sheet was evaluated by using Raman spectroscopy. Finally, GNR and metallic electrodes were fabricated by applying MEMS techniques such as electron beam evaporation using stencil mask and electron beam lithography.

Original languageEnglish
Title of host publicationIMPACT 2017 - 12th International Microsystems, Packaging, Assembly and Circuits Technology Conference, Proceedings
PublisherIEEE Computer Society
Pages214-217
Number of pages4
ISBN (Electronic)9781538647196
DOIs
Publication statusPublished - 2017 Jul 1
Event12th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2017 - Taipei, Taiwan, Province of China
Duration: 2017 Oct 252017 Oct 27

Publication series

NameProceedings of Technical Papers - International Microsystems, Packaging, Assembly, and Circuits Technology Conference, IMPACT
Volume2017-October
ISSN (Print)2150-5934
ISSN (Electronic)2150-5942

Other

Other12th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2017
CountryTaiwan, Province of China
CityTaipei
Period17/10/2517/10/27

ASJC Scopus subject areas

  • Hardware and Architecture
  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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