Development of high quality AlN epitaxial film for 2.4GHz front-end SAW matched filter

S. Tomabechi, K. Wada, S. Saigusa, H. Matsuhashi, H. Nakase, K. Masu, K. Tsubouchi

Research output: Contribution to journalConference articlepeer-review

5 Citations (Scopus)

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Physics & Astronomy