Development of high precision metal micro-electro-mechanical-systems column for portable surface acoustic wave gas chromatograph

Takamitsu Iwaya, Shingo Akao, Toshihiro Sakamoto, Toshihiro Tsuji, Noritaka Nakaso, Kazushi Yamanaka

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

Abstract

In the field of environmental measurement and security, a portable gas chromatograph (GC) is required for the on-site analysis of multiple hazardous gases. Although the gas separation column has been downsized using micro-electro-mechanical-systems (MEMS) technology, an MEMS column made of silicon and glass still does not have sufficient robustness and a sufficiently low fabrication cost for a portable GC. In this study, we fabricated a robust and inexpensive high-precision metal MEMS column by combining diffusion-bonded etched stainless-steel plates with alignment evaluation using acoustic microscopy. The separation performance was evaluated using a desktop GC with a flame ionization detector and we achieved the high separation performance comparable to the best silicon MEMS column fabricated using a dynamic coating method. As an application, we fabricated a palm-size surface acoustic wave (SAW) GC combining this column with a ball SAW sensor and succeeded in separating and detecting a mixture of volatile organic compounds.

Original languageEnglish
Article number07GC24
JournalJapanese journal of applied physics
Volume51
Issue number7 PART2
DOIs
Publication statusPublished - 2012 Jul 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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