Development of glancing-incidence and glancing-take-off X-ray fluorescence apparatus for surface and thin-film analyses

Kouichi Tsuji, Kazuaki Wagatsuma, Kichinosuke Hirokawa, Takashi Yamada, Tadashi Utaka

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

We have studied X-ray fluorescence analysis under glancing incidence and glancing take-off conditions. Recently, we have developed a third apparatus for detecting glancing-incidence and take-off X-ray fluorescence, which makes it possible to measure the incident-angle dependence, the take-off-angle dependence, X-ray reflectivity, and X-ray diffraction. Primarily, we have measured the take-off angular dependence of X-ray fluorescence using this apparatus. Glancing take-off X-ray fluorescence has some advantages in comparison with glancing-incidence X-ray fluorescence. The surface density and the absolute angles were determined by analysing the take-off angle dependence of the fluorescent X-rays emitted from identical atoms with the aid of the reciprocity theorem.

Original languageEnglish
Pages (from-to)841-846
Number of pages6
JournalSpectrochimica Acta - Part B Atomic Spectroscopy
Volume52
Issue number7
DOIs
Publication statusPublished - 1997 Jul 1

Keywords

  • Surface analysis
  • Surface density
  • Total reflection
  • X-ray fluorescence

ASJC Scopus subject areas

  • Analytical Chemistry
  • Atomic and Molecular Physics, and Optics
  • Instrumentation
  • Spectroscopy

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