TY - JOUR
T1 - Development of glancing-incidence and glancing-take-off X-ray fluorescence apparatus for surface and thin-film analyses
AU - Tsuji, Kouichi
AU - Wagatsuma, Kazuaki
AU - Hirokawa, Kichinosuke
AU - Yamada, Takashi
AU - Utaka, Tadashi
N1 - Funding Information:
Parts of this work were supported by a Grant-in-Aid (No. 07555260) from the Ministry of Education, Science, and Culture of Japan. We thank Mr. S. Shucart for his valuable suggestions.
Copyright:
Copyright 2017 Elsevier B.V., All rights reserved.
PY - 1997/7/1
Y1 - 1997/7/1
N2 - We have studied X-ray fluorescence analysis under glancing incidence and glancing take-off conditions. Recently, we have developed a third apparatus for detecting glancing-incidence and take-off X-ray fluorescence, which makes it possible to measure the incident-angle dependence, the take-off-angle dependence, X-ray reflectivity, and X-ray diffraction. Primarily, we have measured the take-off angular dependence of X-ray fluorescence using this apparatus. Glancing take-off X-ray fluorescence has some advantages in comparison with glancing-incidence X-ray fluorescence. The surface density and the absolute angles were determined by analysing the take-off angle dependence of the fluorescent X-rays emitted from identical atoms with the aid of the reciprocity theorem.
AB - We have studied X-ray fluorescence analysis under glancing incidence and glancing take-off conditions. Recently, we have developed a third apparatus for detecting glancing-incidence and take-off X-ray fluorescence, which makes it possible to measure the incident-angle dependence, the take-off-angle dependence, X-ray reflectivity, and X-ray diffraction. Primarily, we have measured the take-off angular dependence of X-ray fluorescence using this apparatus. Glancing take-off X-ray fluorescence has some advantages in comparison with glancing-incidence X-ray fluorescence. The surface density and the absolute angles were determined by analysing the take-off angle dependence of the fluorescent X-rays emitted from identical atoms with the aid of the reciprocity theorem.
KW - Surface analysis
KW - Surface density
KW - Total reflection
KW - X-ray fluorescence
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U2 - 10.1016/S0584-8547(96)01667-9
DO - 10.1016/S0584-8547(96)01667-9
M3 - Article
AN - SCOPUS:0031162721
VL - 52
SP - 841
EP - 846
JO - Spectrochimica Acta - Part B Atomic Spectroscopy
JF - Spectrochimica Acta - Part B Atomic Spectroscopy
SN - 0584-8547
IS - 7
ER -