Development of full-field x-ray phase-tomographic microscope based on laboratory x-ray source

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

An X-ray phase tomographic microscope that can quantitatively measure the refractive index of a sample in three dimensions with a high spatial resolution was developed by installing a Lau interferometer consisting of an absorption grating and a π/2 phase grating into the optics of an X-ray microscope. The optics comprises a Cu rotating anode X-ray source, capillary condenser optics, and a Fresnel zone plate for the objective. The microscope has two optical modes: a large-field-of-view mode (field of view: 65 μm × 65 μm) and a high-resolution mode (spatial resolution: 50 nm). Optimizing the parameters of the interferometer yields a self-image of the phase grating with ∼60% visibility. Through the normal fringe-scanning measurement, a twin phase image, which has an overlap of two phase image of opposite contrast with a shear distance much larger than system resolution, is generated. Although artifacts remain to some extent currently when a phase image is calculated from the twin phase image, this system can obtain high-spatial-resolution images resolving 50-nm structures. Phase tomography with this system has also been demonstrated using a phase object.

Original languageEnglish
Title of host publicationDevelopments in X-Ray Tomography XI
EditorsGe Wang, Bert Muller
PublisherSPIE
ISBN (Electronic)9781510612396
DOIs
Publication statusPublished - 2017 Jan 1
EventDevelopments in X-Ray Tomography XI 2017 - San Diego, United States
Duration: 2017 Aug 82017 Aug 10

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume10391
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherDevelopments in X-Ray Tomography XI 2017
CountryUnited States
CitySan Diego
Period17/8/817/8/10

Keywords

  • Grating interferometer
  • X-ray microscope
  • X-ray phase imaging
  • X-ray tomography

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Takano, H., Wu, Y., & Momose, A. (2017). Development of full-field x-ray phase-tomographic microscope based on laboratory x-ray source. In G. Wang, & B. Muller (Eds.), Developments in X-Ray Tomography XI [1039110] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10391). SPIE. https://doi.org/10.1117/12.2273534