Abstract
For improving high-frequency characteristics and soft magnetic properties of (Fe7 Co3)B-based thin films, the effects of Ni addition and an oblique deposition method on the microstructures have been examined. The Ni addition to (Fe7Co3)B films was found to enhance B segregation on grain boundaries, which resulted in the formation of a well-defined columnar structure and the increase of film resistivity. Utilizing the columnar structure, large in-plane anisotropy was induced by an oblique deposition method which enabled the control of the inclination angle of the columns. As a result, the ferromagnetic resonance of (Fe7Co 3)71Ni7B22 thin films reached 6.2 GHz.
Original language | English |
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Pages (from-to) | 3259-3261 |
Number of pages | 3 |
Journal | IEEE Transactions on Magnetics |
Volume | 41 |
Issue number | 10 |
DOIs | |
Publication status | Published - 2005 Oct 1 |
Keywords
- High-frequency characteristics
- Microstructural analysis
- Oblique deposition method
- Soft magnetic thin film
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering