Abstract
Aluminum-alloy chambers treated with newly developed mirror-polishing technique (organo-mechanochemical polishing) have been constructed and their vacuum properties have been tested. The one evacuated tandem with two turbo-molecular pumps (TMP: 340 l s-1+ 60 l s-1) reached a value of 1.5 x 10-9 Pa in 48 h of initial evacuation, which is one of the lowest pressures attained by TMPs only, in view of the rather large volume (22 l) and the surface area (5.7 x 103 cm2) of the chamber and the smaller pumping speed (114 l s-1) of the evacuating system. The other chamber equipped with specially designed titanium sublimation pump in addition to TMPs attained a pressure as low as 4.9 x 10-11 Pa, which includes a possibility of reaching 9 x 10-12 Pa if we accept a published value of 4 x 10-11 Pa for the ESD error of extractor gauge in this range.
Original language | English |
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Pages (from-to) | 425-428 |
Number of pages | 4 |
Journal | Vacuum |
Volume | 44 |
Issue number | 5-7 |
DOIs | |
Publication status | Published - 1993 Jan 1 |
ASJC Scopus subject areas
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films