Development of extremely high vacuums with mirror-polished Al-alloy chambers

Maki Suemitsu, Y. Uneme, N. Miyamoto

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


Aluminum-alloy chambers treated with newly developed mirror-polishing technique (organo-mechanochemical polishing) have been constructed and their vacuum properties have been tested. The one evacuated tandem with two turbo-molecular pumps (TMP: 340 l s-1+ 60 l s-1) reached a value of 1.5 x 10-9 Pa in 48 h of initial evacuation, which is one of the lowest pressures attained by TMPs only, in view of the rather large volume (22 l) and the surface area (5.7 x 103 cm2) of the chamber and the smaller pumping speed (114 l s-1) of the evacuating system. The other chamber equipped with specially designed titanium sublimation pump in addition to TMPs attained a pressure as low as 4.9 x 10-11 Pa, which includes a possibility of reaching 9 x 10-12 Pa if we accept a published value of 4 x 10-11 Pa for the ESD error of extractor gauge in this range.

Original languageEnglish
Pages (from-to)425-428
Number of pages4
Issue number5-7
Publication statusPublished - 1993 Jan 1

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films


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