Development of extremely high vacuums with mirror-polished Al-alloy chambers

Maki Suemitsu; Y. Uneme; N. Miyamoto

doi:10.1016/0042-207X(93)90063-G

Development of extremely high vacuums with mirror-polished Al-alloy chambers

Maki Suemitsu, Y. Uneme, N. Miyamoto

Information Devices Division

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Aluminum-alloy chambers treated with newly developed mirror-polishing technique (organo-mechanochemical polishing) have been constructed and their vacuum properties have been tested. The one evacuated tandem with two turbo-molecular pumps (TMP: 340 l s^-1+ 60 l s^-1) reached a value of 1.5 x 10^-9 Pa in 48 h of initial evacuation, which is one of the lowest pressures attained by TMPs only, in view of the rather large volume (22 l) and the surface area (5.7 x 10³ cm²) of the chamber and the smaller pumping speed (114 l s^-1) of the evacuating system. The other chamber equipped with specially designed titanium sublimation pump in addition to TMPs attained a pressure as low as 4.9 x 10^-11 Pa, which includes a possibility of reaching 9 x 10^-12 Pa if we accept a published value of 4 x 10^-11 Pa for the ESD error of extractor gauge in this range.

Original language	English
Pages (from-to)	425-428
Number of pages	4
Journal	Vacuum
Volume	44
Issue number	5-7
DOIs	https://doi.org/10.1016/0042-207X(93)90063-G
Publication status	Published - 1993 Jan 1

ASJC Scopus subject areas

Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films

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10.1016/0042-207X(93)90063-G

Cite this

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abstract = "Aluminum-alloy chambers treated with newly developed mirror-polishing technique (organo-mechanochemical polishing) have been constructed and their vacuum properties have been tested. The one evacuated tandem with two turbo-molecular pumps (TMP: 340 l s-1+ 60 l s-1) reached a value of 1.5 x 10-9 Pa in 48 h of initial evacuation, which is one of the lowest pressures attained by TMPs only, in view of the rather large volume (22 l) and the surface area (5.7 x 103 cm2) of the chamber and the smaller pumping speed (114 l s-1) of the evacuating system. The other chamber equipped with specially designed titanium sublimation pump in addition to TMPs attained a pressure as low as 4.9 x 10-11 Pa, which includes a possibility of reaching 9 x 10-12 Pa if we accept a published value of 4 x 10-11 Pa for the ESD error of extractor gauge in this range.",

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AU - Suemitsu, Maki

AU - Uneme, Y.

AU - Miyamoto, N.

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N2 - Aluminum-alloy chambers treated with newly developed mirror-polishing technique (organo-mechanochemical polishing) have been constructed and their vacuum properties have been tested. The one evacuated tandem with two turbo-molecular pumps (TMP: 340 l s-1+ 60 l s-1) reached a value of 1.5 x 10-9 Pa in 48 h of initial evacuation, which is one of the lowest pressures attained by TMPs only, in view of the rather large volume (22 l) and the surface area (5.7 x 103 cm2) of the chamber and the smaller pumping speed (114 l s-1) of the evacuating system. The other chamber equipped with specially designed titanium sublimation pump in addition to TMPs attained a pressure as low as 4.9 x 10-11 Pa, which includes a possibility of reaching 9 x 10-12 Pa if we accept a published value of 4 x 10-11 Pa for the ESD error of extractor gauge in this range.

AB - Aluminum-alloy chambers treated with newly developed mirror-polishing technique (organo-mechanochemical polishing) have been constructed and their vacuum properties have been tested. The one evacuated tandem with two turbo-molecular pumps (TMP: 340 l s-1+ 60 l s-1) reached a value of 1.5 x 10-9 Pa in 48 h of initial evacuation, which is one of the lowest pressures attained by TMPs only, in view of the rather large volume (22 l) and the surface area (5.7 x 103 cm2) of the chamber and the smaller pumping speed (114 l s-1) of the evacuating system. The other chamber equipped with specially designed titanium sublimation pump in addition to TMPs attained a pressure as low as 4.9 x 10-11 Pa, which includes a possibility of reaching 9 x 10-12 Pa if we accept a published value of 4 x 10-11 Pa for the ESD error of extractor gauge in this range.

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Development of extremely high vacuums with mirror-polished Al-alloy chambers

Abstract

ASJC Scopus subject areas

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