Development of evaluation method for estimating stress-induced change in drain current in deep-sub-micron MOSFETs

Yukihiro Kumagai, Hiroyuki Ohta, Hideo Miura, Akihiro Shimizu, Shiro Kamohara, Keiichi Maekawa

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Development of evaluation method for estimating stress-induced change in drain current in deep-sub-micron MOSFETs'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science