Development of environmental harmony resist removal system using cryogenic particulate spray

Jun Ishimoto, Hideo Horibe

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)285-288
Number of pages4
JournalJournal of Photopolymer Science and Technology
Volume28
Issue number2
DOIs
Publication statusPublished - 2015 Aug 19

Keywords

  • Atomization
  • Cryogenics
  • Multiphase flow
  • Solid nitrogen
  • Spray

ASJC Scopus subject areas

  • Polymers and Plastics
  • Organic Chemistry
  • Materials Chemistry

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