@article{5d1e932e99494d0391ab7685a74b2e93,
title = "Development of environmental harmony resist removal system using cryogenic particulate spray",
keywords = "Atomization, Cryogenics, Multiphase flow, Solid nitrogen, Spray",
author = "Jun Ishimoto and Hideo Horibe",
year = "2015",
month = aug,
day = "19",
doi = "10.2494/photopolymer.28.285",
language = "English",
volume = "28",
pages = "285--288",
journal = "Journal of Photopolymer Science and Technology",
issn = "0914-9244",
publisher = "Tokai University",
number = "2",
}