Development of ballistic hot electron emitter and its applications to parallel processing: Active-matrix massive direct-write lithography in vacuum and thin films deposition in solutions

N. Koshida, A. Kojima, N. Ikegami, R. Suda, M. Yagi, J. Shirakashi, T. Yoshida, H. Miyaguchi, M. Muroyama, H. Nishino, S. Yoshida, M. Sugata, K. Totsu, M. Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

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