Development of an optical probe for profile inspection of mirror surfaces

Wei Gao, Satoshi Kiyono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An optical probe for profile inspections of mirror surfaces is developed. This probe can detect the displacement and angle at one point on the measured surface simultaneously. Both the displacement meter and the angle meter of the probe use position sensing detectors (PSD) to detect the position of the optical spot. The principle of the displacement meter is the image formation system, and that of the angle meter is the autocollimation. The displacement meter and the angle meter have two important characteristics. One is the good linearity, the other is that they can detect the displacement and angle independently without interfering with each other. An optical fiber output is used as the light source so that the probe is made compact and to have good characteristics. To eliminate influences of disturbance lights, the light intensity of the laser diode is modulated by a sine wave of 20 kHz, only the position signal is taken out from signals obtained from the PSD in the demodulation circuit. According to the geometrical relation and the active size of the PSD, the displacement meter can measure more than 1000 μm and 120 minutes (arc) with good linearity, respectively. Estimating from the signal to noise ratio of the system, the displacement resolution and the angle resolution are 10 nm and 0.1 arcsec, respectively. Some experimental results to confirm the performance of the proposed probe are shown in this paper.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsFrederick Y. Wu, Shenghua Ye
Pages12-21
Number of pages10
Publication statusPublished - 1996 Dec 1
EventAutomated Optical Inspection for Industry - Beijing, China
Duration: 1996 Nov 61996 Nov 7

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume2899
ISSN (Print)0277-786X

Other

OtherAutomated Optical Inspection for Industry
CityBeijing, China
Period96/11/696/11/7

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Gao, W., & Kiyono, S. (1996). Development of an optical probe for profile inspection of mirror surfaces. In F. Y. Wu, & S. Ye (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (pp. 12-21). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2899).