Development of an Optical Diaphragm Vacuum Gauge Using a Photothermal Vibration

Seiki Inaba, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Development of an Optical Diaphragm Vacuum Gauge Using a Photothermal Vibration'. Together they form a unique fingerprint.