Development of an Optical Diaphragm Vacuum Gauge Using a Photothermal Vibration

Seiki Inaba, Kazuhiro Hane

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)140-142
Number of pages3
JournalShinku/Journal of the Vacuum Society of Japan
Volume35
Issue number3
DOIs
Publication statusPublished - 1992

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this