Development of an optical angle sensor with a mode-locked femtosecond laser source for surface profile measurement

Yuki Shimizu, Shota Takazono, Yuri Kanda, Hiraku Matsukuma, Wei Gao, Hajime Inaba

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Angle sensors based on the laser autocollimation are often employed to evaluate surface profiles of a target of interest. The authors have developed a femtosecond laser angle sensor, in which a spectrometer or an optical spectrum analyzer with a single-mode fiber is employed as the photodetector for simultaneous capturing of the multiple optical modes. In this paper, the concept of the femtosecond laser angle sensor is applied to evaluate the surface profile of a target of interest. An optical setup is designed in such a way that each mode in the spectrum of the mode-locked femtosecond is utilized as the laser beam to measure the local slope of a measurement target at each different point to evaluate the surface profile. Some basic experiments are carried out by using the developed optical setup with a mode-locked femtosecond laser source to evaluate basic performances of the developed optical setup as an optical angle sensor.

Original languageEnglish
Title of host publicationJSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020
PublisherAmerican Society of Mechanical Engineers
ISBN (Electronic)9780791883624
DOIs
Publication statusPublished - 2020
EventJSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020 - Virtual, Online
Duration: 2020 Sep 3 → …

Publication series

NameJSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020

Conference

ConferenceJSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020
CityVirtual, Online
Period20/9/3 → …

Keywords

  • Femtosecond laser
  • Laser autocollimation
  • Optical angle sensor
  • Single-mode fiber

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • Mechanics of Materials
  • Materials Science (miscellaneous)
  • Instrumentation

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