Development of an improved calibration method for the LFB ultrasonic material characterization system

Yuji Ohashi, Jun Ichi Kushibiki

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)

Abstract

We investigated standard specimens for accurately calibrating the line-focus-beam ultrasonic material characterization (LFB-UMC) system without system dependencies. We evaluated several types of lithium tantalate (LiTaO 3) substrates using two LFB-UMC systems with different device/system characteristics to measure and calibrate the propagation characteristics of the leaky surface acoustic waves (LSAWs), and analyzed the variations between the calibrated results. We concluded from this analysis that, by selecting materials with the cut surfaces and propagation directions of standard specimens that are identical to the objects to be calibrated, calibration errors resulting from different performance characteristics between the two systems could be nearly eliminated. Also, analytical errors caused by the effects of spectra with two close peaks (another propagation wave mode), one of the most common problems of characterization in the past, could be eliminated at the same time by this method.

Original languageEnglish
Pages (from-to)686-694
Number of pages9
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume51
Issue number6
DOIs
Publication statusPublished - 2004 Jun 1

ASJC Scopus subject areas

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Development of an improved calibration method for the LFB ultrasonic material characterization system'. Together they form a unique fingerprint.

Cite this