Development of an array of compound refractive lenses for sub-pixel resolution, large field of view, and time-saving in scanning hard x-ray microscopy

Talgat Mamyrbayev, Alexander Opolka, Alexey Ershov, Josephine Gutekunst, Pascal Meyer, Katsumasa Ikematsu, Atsushi Momose, Arndt Last

Research output: Contribution to journalArticlepeer-review

Abstract

A two-dimensional array of compound refractive lenses (2D array of CRLs) designed for hard X-ray imaging with a 3.5 mm2 large field of view is presented. The array of CRLs consists of 2D polymer biconcave parabolic 34 x 34 multi-lenses fabricated via deep X-ray lithography. The developed refractive multi-lens array was applied for sub-pixel resolution scanning transmission X-ray microscopy; a raster scan with only 55 x 55 steps provides a 3.5 megapixel image. The optical element was experimentally characterized at the Diamond Light Source at 34 keV. An array of point foci with a 55 μmperiod and an average size of ca. 2.1 μmx 3.6 μmwas achieved. In comparison with the conventional scanning transmission microscopy using one CRL, sub-pixel resolution scanning transmission hard X-ray microscopy enables a large field of view and short scanning time while keeping the high spatial resolution.

Original languageEnglish
Article number4132
Pages (from-to)1-9
Number of pages9
JournalApplied Sciences (Switzerland)
Volume10
Issue number12
DOIs
Publication statusPublished - 2020 Jun 1

Keywords

  • Deep X-ray lithography
  • Scanning transmission X-raymicroscopy
  • Sub-pixel resolution
  • Two-dimensional compound refractive lens array

ASJC Scopus subject areas

  • Materials Science(all)
  • Instrumentation
  • Engineering(all)
  • Process Chemistry and Technology
  • Computer Science Applications
  • Fluid Flow and Transfer Processes

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