Development of a Wide Range pH Sensor based on Electrolyte-Insulator-Semiconductor Structure with Corrosion-Resistant Al 2O3-Ta2O5 and Al2O 3-ZrO2 Double-Oxide Thin Films

Shoji Yoshida, Nobuyoshi Hara, Katsuhisa Sugimoto

Research output: Contribution to journalArticlepeer-review

41 Citations (Scopus)

Abstract

In order to develop a pH sensor having a wide pH response range from strong acid to strong alkali, electrolyte-insulator-semiconductor capacitors using corrosion-resistant Al2O3-Ta2O 5 and Al2O3-ZrO2 double-oxide films as he insulator were fabricated and their response characteristics to H + and alkali metal ions were examined. The sensors with Al 2O3-Ta2O5 and Al2O 3-ZrO2 films having an Al3+ cationic fraction of about 0.4 showed a wide linear pH response range of-1.5 to 13.0 and a small alkali metal ion sensitivity. The use of the Al2O3-Ta 2O5 film is suitable for increasing pH sensitivity and that of the Al2O3-ZrO2 film is promising for increasing corrosion resistance against strong alkali solutions.

Original languageEnglish
Pages (from-to)H53-H58
JournalJournal of the Electrochemical Society
Volume151
Issue number3
DOIs
Publication statusPublished - 2004 Apr 14

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry

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