Development of a vertical optical coupler using a slanted etching of InP/InGaAsP waveguide

Sunghan Choi, Akio Higo, Masaru Zaitsu, Myung Joon Kwack, Masakazu Sugiyama, Hiroshi Toshiyoshi, Yoshiaki Nakano

    Research output: Contribution to journalLetterpeer-review

    3 Citations (Scopus)

    Abstract

    We demonstrate a simple and efficient optical coupler for vertical coupling between optical fibers and InP-based waveguides using a slant-etched mirror. The angle of the etched mirror can be controlled by using an aluminum jig with a beveled surface inserted under the substrate during RIE (reactive ion etching) of InP/InGaAsP. The offchip coupler is fabricated simultaneously with a high-mesa waveguide with only one etching process. Coupling loss of 7.3 dB between the tapered single-mode fibers is obtained within the wavelength of 1530- 1570 nm.

    Original languageEnglish
    JournalIEICE Electronics Express
    Volume10
    Issue number6
    DOIs
    Publication statusPublished - 2013 Apr 16

    Keywords

    • Optical coupler
    • Optical waveguide
    • Slanted etching

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Electrical and Electronic Engineering

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