Development of a three-axis angle sensor - Proposal of the measurement principle and identification experiments

Yusuke Saito, Yoshikazu Arai, Wei Gao

Research output: Contribution to journalArticlepeer-review

Abstract

This paper describes a 3-axes angle sensor based on laser autocollimation for simultaneous measurement of small tilt angles about X, Y and Z-axes. The sensor consists of a laser diode as the light source and quadrant photodiodes (QPDs) as the optical position-sensing device. Differing from a conventional 2-axis autocollimator, the sensor uses a diffractive grating as the target mirror. It is verified that the sensitivity of the sensor in the θx (rolling) direction is determined by the pitch of the diffractive grating and the diameter of the laser beam. The sensitivities in the θy (pitching) and the 1 (yawing) direction are determined by the wavelength and the beam diameter of the laser beam. It is confirmed that the resolution of θx is about 0.2 arc-seconds, and those of θy and θ, are about 0.02 arc-seconds. Optical design and experimental results are presented.

Original languageEnglish
Pages (from-to)997-1001
Number of pages5
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume74
Issue number9
DOIs
Publication statusPublished - 2008 Sep
Externally publishedYes

Keywords

  • 3-axis angle sensor
  • Laser autocollimation
  • Sensitivity

ASJC Scopus subject areas

  • Mechanical Engineering

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