In order to develop a corrosion-free halogen gas delivery system for use in semiconductor manufacturing, Cr2O3 passivation of ferritic and austenitic stainless steels has been investigated. It has been shown that a Cr2O3 layer can be formed on an electropolished (EP) surface of ferritic 26Cr-1Mo stainless steel by oxidation above 600 °C, but excellent corrosion resistance performance to Cl2 gas can be obtained only by oxidation above 700 °C. On the other hand, on the EP surface of austenitic SUS 316L, a corrosion-resistant Cr2O3 layer is not formed by oxidation even up to 800 °C.
|Number of pages||7|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|Publication status||Published - 1998 Sep|
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering