Development of a stainless steel tube resistant to corrosive Cl2 gas for use in semiconductor manufacturing

T. Ohmi, M. Yoshida, Y. Matudaira, Y. Shirai, O. Nakamura, M. Gozyuki, Y. Hashimoto

Research output: Contribution to journalArticlepeer-review

Abstract

In order to develop a corrosion-free halogen gas delivery system for use in semiconductor manufacturing, Cr2O3 passivation of ferritic and austenitic stainless steels has been investigated. It has been shown that a Cr2O3 layer can be formed on an electropolished (EP) surface of ferritic 26Cr-1Mo stainless steel by oxidation above 600 °C, but excellent corrosion resistance performance to Cl2 gas can be obtained only by oxidation above 700 °C. On the other hand, on the EP surface of austenitic SUS 316L, a corrosion-resistant Cr2O3 layer is not formed by oxidation even up to 800 °C.

Original languageEnglish
Pages (from-to)2789-2795
Number of pages7
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume16
Issue number5
Publication statusPublished - 1998 Sep

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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