Development of a secondary electron energy analyzer for a transmission electron microscope

Hideyuki Magara, Takeshi Tomita, Yukihito Kondo, Takafumi Sato, Zentaro Akase, Daisuke Shindo

Research output: Contribution to journalArticlepeer-review

Abstract

A secondary electron (SE) energy analyzer was developed for a transmission electron microscope. The analyzer comprises a microchannel plate (MCP) for detecting electrons, a coil for collecting SEs emitted from the specimen, a tube for reducing the number of backscattered electrons incident on the MCP, and a retarding mesh for selecting the energy of SEs incident on the MCP. The detection of the SEs associated with charging phenomena around a charged specimen was attempted by performing electron holography and SE spectroscopy using the energy analyzer. The results suggest that it is possible to obtain the energy spectra of SEs using the analyzer and the charging states of a specimen by electron holography simultaneously.

Original languageEnglish
Pages (from-to)121-124
Number of pages4
JournalMicroscopy
Volume67
Issue number2
DOIs
Publication statusPublished - 2018 Apr 1

Keywords

  • Charging
  • Electric field
  • Electron holography
  • Secondary electron spectroscopy

ASJC Scopus subject areas

  • Structural Biology
  • Instrumentation
  • Radiology Nuclear Medicine and imaging

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