Development of a probing system for a micro-coordinate measuring machine by utilizing shear-force detection

So Ito, Issei Kodama, Wei Gao

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

Abstract

This paper introduces a newly developed probing system for a micro-coordinate measurement machine (micro-CMM) based on an interaction force generated by the water layer on the surface of the measuring object. In order to measure the dimensions of the micrometric structures, a probing system using a nanopipette ball stylus has been developed. A glass microsphere with diameter of 9μm is used as a stylus tip of the probing system. The glass nanopipette, which is fabricated from a capillary glass tube by a thermal pulling process, is employed as a stylus shaft to improve the fixation strength of the stylus tip. The approach between the stylus tip and the surface of the measuring object can be detected by utilizing the method of shear-force detection. The stylus is oscillated in the lateral direction at its resonant frequency to detect an interaction force owing to the viscoelasticity of the meniscus layer existing on the surface of the measuring object. The oscillation amplitude is decreased by the shear-force applied to the stylus tip. In this study, the basic characteristics of the probing system including sensitivity, resolution and reproducibility are investigated. The experimental result of dimensional measurement of micrometer-scale structure is presented.

Original languageEnglish
Article number064011
JournalMeasurement Science and Technology
Volume25
Issue number6
DOIs
Publication statusPublished - 2014 Jun

Keywords

  • dimensional measurement
  • micro-CMM
  • nanopipette ball probe
  • probing system
  • shear-force detection

ASJC Scopus subject areas

  • Instrumentation
  • Engineering (miscellaneous)
  • Applied Mathematics

Fingerprint Dive into the research topics of 'Development of a probing system for a micro-coordinate measuring machine by utilizing shear-force detection'. Together they form a unique fingerprint.

Cite this