Thermal barrier coatings have been widely used in gas turbine engines in order to protect substrate metal alloy against high temperature and to enhance turbine efficiency. Currently, there are no reliable nondestructive techniques available to monitor TBC integrity over lifetime of the coating. Hence, to detect top coating (TC) and TGO thicknesses, a microwave nondestructive technique that utilizes a rectangular waveguide was developed. The phase of the reflection coefficient at the interface of TC and waveguide varies for different TGO and TC thicknesses. Therefore, measuring the phase of the reflection coefficient enables us to accurately calculate these thicknesses. Finally, a theoretical analysis was used to evaluate the reliability of the experimental results.