Development of a new microscopic four-point AFM probe for the measurement of local electrical conductivity

Bing Feng Ju, Masumi Saka, Yang Ju

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A microscopic four-point atomic force microscope (AFM) probe with concomitant experimental technique for local conductivity measurement is presented. A silicon nitride based AFM contact-mode probe with a V-shaped tip, which patterned by using the conventional photolithography method, is selected. The probe is then etched to four parallel isolated electrodes for the purpose of performing current input and electrical potential drop measurement. The new probe not only inherits the function of surface topography generating but also has the capability of characterizing the local conductivity simultaneously. The nanoresolution position control mechanism of AFM allows the probe scanning across micrometers sized area and creating high spatial resolution map of the in-plane conductivities. Experiments have shown the microscopic four-point probe to be mechanically flexible and robust. The repeatable conductivity measurements on the surface of aluminum and indium tin oxide (ITO) thin films indicate the technique has potential application for characterizing the devices and materials in microscale.

Original languageEnglish
Title of host publicationProceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems
Subtitle of host publicationAdvances in Electronic Packaging 2005
Pages1955-1958
Number of pages4
Publication statusPublished - 2006 Feb 23
EventASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005 - San Francisco, CA, United States
Duration: 2005 Jul 172005 Jul 22

Publication series

NameProceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005
VolumePART C

Other

OtherASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005
CountryUnited States
CitySan Francisco, CA
Period05/7/1705/7/22

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Ju, B. F., Saka, M., & Ju, Y. (2006). Development of a new microscopic four-point AFM probe for the measurement of local electrical conductivity. In Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005 (pp. 1955-1958). (Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005; Vol. PART C).