Abstract
We report on the computer-aided design of a novel mask for the addressable ternary phase diagram to serve a quick screening of multi-component functional materials. Masking patterns were optimized to make a triangular ternary diagram with each composition changed from 0 to 100% by simulating the deposition process under the condition of synchronous control of the mask motion, target exchange, and laser pulses. Fabrication of a ternary M 0.01 Y 1.99 O 3 (M = Eu, Tm, Tb) phosphor material demonstrates of the direct mapping relationship between the film composition and its cathode luminescence (CL) property.
Original language | English |
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Pages (from-to) | 249-252 |
Number of pages | 4 |
Journal | Applied Surface Science |
Volume | 223 |
Issue number | 1-3 |
DOIs | |
Publication status | Published - 2004 Feb 15 |
Externally published | Yes |
Keywords
- Combinatorial laser MBE
- Combinatorial mask
- Phosphors
- Ternary composition spread
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Physics and Astronomy(all)
- Surfaces and Interfaces
- Surfaces, Coatings and Films