Development of a new combinatorial mask for addressable ternary phase diagramming: Application to rare earth doped phosphors

R. Takahashi; H. Kubota; T. Tanigawa; M. Murakami; Y. Yamamoto; Y. Matsumoto; H. Koinuma

doi:10.1016/S0169-4332(03)00925-5

Development of a new combinatorial mask for addressable ternary phase diagramming: Application to rare earth doped phosphors

R. Takahashi, H. Kubota, T. Tanigawa, M. Murakami, Y. Yamamoto, Y. Matsumoto, H. Koinuma

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

We report on the computer-aided design of a novel mask for the addressable ternary phase diagram to serve a quick screening of multi-component functional materials. Masking patterns were optimized to make a triangular ternary diagram with each composition changed from 0 to 100% by simulating the deposition process under the condition of synchronous control of the mask motion, target exchange, and laser pulses. Fabrication of a ternary M _0.01 Y _1.99 O ₃ (M = Eu, Tm, Tb) phosphor material demonstrates of the direct mapping relationship between the film composition and its cathode luminescence (CL) property.

Original language	English
Pages (from-to)	249-252
Number of pages	4
Journal	Applied Surface Science
Volume	223
Issue number	1-3
DOIs	https://doi.org/10.1016/S0169-4332(03)00925-5
Publication status	Published - 2004 Feb 15
Externally published	Yes

Keywords

Combinatorial laser MBE
Combinatorial mask
Phosphors
Ternary composition spread

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Physics and Astronomy(all)
Surfaces and Interfaces
Surfaces, Coatings and Films

Access to Document

10.1016/S0169-4332(03)00925-5

Cite this

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title = "Development of a new combinatorial mask for addressable ternary phase diagramming: Application to rare earth doped phosphors",

abstract = " We report on the computer-aided design of a novel mask for the addressable ternary phase diagram to serve a quick screening of multi-component functional materials. Masking patterns were optimized to make a triangular ternary diagram with each composition changed from 0 to 100% by simulating the deposition process under the condition of synchronous control of the mask motion, target exchange, and laser pulses. Fabrication of a ternary M 0.01 Y 1.99 O 3 (M = Eu, Tm, Tb) phosphor material demonstrates of the direct mapping relationship between the film composition and its cathode luminescence (CL) property.",

keywords = "Combinatorial laser MBE, Combinatorial mask, Phosphors, Ternary composition spread",

author = "R. Takahashi and H. Kubota and T. Tanigawa and M. Murakami and Y. Yamamoto and Y. Matsumoto and H. Koinuma",

note = "Funding Information: This work was supported by the COMET (Combinatorial Materials Exploration and Technology) project. ",

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T1 - Development of a new combinatorial mask for addressable ternary phase diagramming

T2 - Application to rare earth doped phosphors

AU - Takahashi, R.

AU - Kubota, H.

AU - Tanigawa, T.

AU - Murakami, M.

AU - Yamamoto, Y.

AU - Matsumoto, Y.

AU - Koinuma, H.

N1 - Funding Information: This work was supported by the COMET (Combinatorial Materials Exploration and Technology) project.

PY - 2004/2/15

Y1 - 2004/2/15

N2 - We report on the computer-aided design of a novel mask for the addressable ternary phase diagram to serve a quick screening of multi-component functional materials. Masking patterns were optimized to make a triangular ternary diagram with each composition changed from 0 to 100% by simulating the deposition process under the condition of synchronous control of the mask motion, target exchange, and laser pulses. Fabrication of a ternary M 0.01 Y 1.99 O 3 (M = Eu, Tm, Tb) phosphor material demonstrates of the direct mapping relationship between the film composition and its cathode luminescence (CL) property.

AB - We report on the computer-aided design of a novel mask for the addressable ternary phase diagram to serve a quick screening of multi-component functional materials. Masking patterns were optimized to make a triangular ternary diagram with each composition changed from 0 to 100% by simulating the deposition process under the condition of synchronous control of the mask motion, target exchange, and laser pulses. Fabrication of a ternary M 0.01 Y 1.99 O 3 (M = Eu, Tm, Tb) phosphor material demonstrates of the direct mapping relationship between the film composition and its cathode luminescence (CL) property.

KW - Combinatorial laser MBE

KW - Combinatorial mask

KW - Phosphors

KW - Ternary composition spread

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Development of a new combinatorial mask for addressable ternary phase diagramming: Application to rare earth doped phosphors

Abstract

Keywords

ASJC Scopus subject areas

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