Development of a new combinatorial mask for addressable ternary phase diagramming: Application to rare earth doped phosphors

R. Takahashi, H. Kubota, T. Tanigawa, M. Murakami, Y. Yamamoto, Y. Matsumoto, H. Koinuma

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

We report on the computer-aided design of a novel mask for the addressable ternary phase diagram to serve a quick screening of multi-component functional materials. Masking patterns were optimized to make a triangular ternary diagram with each composition changed from 0 to 100% by simulating the deposition process under the condition of synchronous control of the mask motion, target exchange, and laser pulses. Fabrication of a ternary M 0.01 Y 1.99 O 3 (M = Eu, Tm, Tb) phosphor material demonstrates of the direct mapping relationship between the film composition and its cathode luminescence (CL) property.

Original languageEnglish
Pages (from-to)249-252
Number of pages4
JournalApplied Surface Science
Volume223
Issue number1-3
DOIs
Publication statusPublished - 2004 Feb 15
Externally publishedYes

Keywords

  • Combinatorial laser MBE
  • Combinatorial mask
  • Phosphors
  • Ternary composition spread

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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