Development of a microphotocantilever for near-field scanning optical microscopy

Shinya Akamine, Hiroki Kuwano, Kenji Fukuzawa, Hirofumi Yamada

Research output: Contribution to conferencePaperpeer-review

17 Citations (Scopus)

Abstract

A new type of near-field scanning optical microscopy (NSOM) using a microcantilever with a photo diode on its tip is described. The photo-sensitive cantilever, called a microphotocantilever, was fabricated using micromachining techniques and its use demonstrated. Fine NSOM images below 20 nm are obtained. Atomic force microscopy (AFM) can be done simultaneously to NSOM using the microphotocantilever. Well correlated NSOM and AFM images are obtained in the near-field optical mode.

Original languageEnglish
Pages145-150
Number of pages6
Publication statusPublished - 1995 Jan 1
Externally publishedYes
EventProceedings of the 1995 IEEE Micro Electro Mechanical Systems Conference - Amsterdam, Neth
Duration: 1995 Jan 291995 Feb 2

Other

OtherProceedings of the 1995 IEEE Micro Electro Mechanical Systems Conference
CityAmsterdam, Neth
Period95/1/2995/2/2

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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