Development of a metal-tip cantilever for noncontact atomic force microscopy

Kotone Akiyama, T. Eguchi, T. An, Y. Fujikawa, Y. Yamada-Takamura, T. Sakurai, Y. Hasegawa

Research output: Contribution to journalArticle

35 Citations (Scopus)

Abstract

We report on a focused-ion-beam fabrication of a metal-tip cantilever for noncontact atomic force microscopy (AFM) and demonstrate its superior performance by observing atomically resolved AFM images of the Si (111) 7×7 surface. Characterization of the tip apex by transmission electron microscope revealed that the tip radius is less than 5 nm. Detrimental changes in the resonance frequency and the Q factor of the cantilever due to the attachment of the metal tip are small and do not affect the performance of the AFM imaging. Since the fabrication technique is applicable to any materials, various functional probes can be developed with this method.

Original languageEnglish
Article number033705
JournalReview of Scientific Instruments
Volume76
Issue number3
DOIs
Publication statusPublished - 2005 Mar 1
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation

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  • Cite this

    Akiyama, K., Eguchi, T., An, T., Fujikawa, Y., Yamada-Takamura, Y., Sakurai, T., & Hasegawa, Y. (2005). Development of a metal-tip cantilever for noncontact atomic force microscopy. Review of Scientific Instruments, 76(3), [033705]. https://doi.org/10.1063/1.1865812