Development of a MEMS electrostatic condenser lens array for nc-Si surface electron emitters of the Massive Parallel Electron Beam Direct-Write system

A. Kojima, N. Ikegami, T. Yoshida, H. Miyaguchi, M. Muroyama, S. Yoshida, K. Totsu, N. Koshida, M. Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Developments of a Micro Electro-Mechanical System (MEMS) electrostatic Condenser Lens Array (CLA) for a Massively Parallel Electron Beam Direct Write (MPEBDW) lithography system are described. The CLA converges parallel electron beams for fine patterning. The structure of the CLA was designed on a basis of analysis by a finite element method (FEM) simulation. The lens was fabricated with precise machining and assembled with a nanocrystalline silicon (nc-Si) electron emitter array as an electron source of MPEBDW. The nc-Si electron emitter has the advantage that a vertical-emitted surface electron beam can be obtained without any extractor electrodes. FEM simulation of electron optics characteristics showed that the size of the electron beam emitted from the electron emitter was reduced to 15% by a radial direction, and the divergence angle is reduced to 1/18.

Original languageEnglish
Title of host publicationAlternative Lithographic Technologies VIII
EditorsJoy Y. Cheng, Christopher Bencher
PublisherSPIE
ISBN (Electronic)9781510600126
DOIs
Publication statusPublished - 2016 Jan 1
EventAlternative Lithographic Technologies VIII - San Jose, United States
Duration: 2016 Feb 222016 Feb 25

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9777
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherAlternative Lithographic Technologies VIII
CountryUnited States
CitySan Jose
Period16/2/2216/2/25

Keywords

  • Condenser Lens Array
  • Electron Beam Lithography
  • MEMS
  • Massive Parallel
  • Nanocrystalline Silicon

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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