Development of a high energy resolution electron energy-loss spectroscopy microscope

Masami Terauchi, M. Tanaka, K. Tsuno, M. Ishida

Research output: Contribution to journalArticle

87 Citations (Scopus)

Abstract

We have developed a high energy resolution electron energy-loss spectroscopy (EELS) microscope, which can take spectra from specified small specimen areas and specified small reciprocal space areas to investigate detailed electronic structures. The EELS microscope is equipped with retarding Wien filters as the monochromator and the analyser. The filters are designed to achieve a stigmatic focus. The energy resolutions are 12 meV and 25 meV for cases without and with a specimen, respectively. Spatial and momentum resolutions are 30-110 nm in diameter and 1.1 nm-1 in angular diameter, respectively. EELS spectra are presented to show the performance of this instrument.

Original languageEnglish
Pages (from-to)203-209
Number of pages7
JournalJournal of Microscopy
Volume194
Issue number1
DOIs
Publication statusPublished - 1999 Jan 1

Keywords

  • Band gap energy
  • Core exciton of diamond
  • Density of states of a- rhombohedral boron
  • Electron energy-loss spectroscopy microscope
  • High energy- resolution, retardation
  • Stigmatic focus
  • Wien filter

ASJC Scopus subject areas

  • Pathology and Forensic Medicine
  • Histology

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