Development of a cryogenic stage for an ion-milling instrument

Masami Terauchi, Futami Satou, Hideo Sugizaki, Katsuaki Suganuma

    Research output: Contribution to journalArticlepeer-review

    3 Citations (Scopus)

    Abstract

    A specimen-cooling device has been designed, manufactured and integrated into a commercial ion-milling instrument for transmission electron microscopy. The instrument enables us to prepare section specimens of tin-plated Cu without forming intermetallic compound particles and/or voids. The results show that cooling of specimen during ion-milling process is necessary for fine structure investigations of low melting temperature materials.

    Original languageEnglish
    Pages (from-to)25-27
    Number of pages3
    JournalJournal of Electron Microscopy
    Volume60
    Issue number1
    DOIs
    Publication statusPublished - 2011 Feb

    Keywords

    • Sn-plating
    • cooling stage
    • ion-milling

    ASJC Scopus subject areas

    • Instrumentation

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