Development of a cryogenic stage for an ion-milling instrument

Masami Terauchi, Futami Satou, Hideo Sugizaki, Katsuaki Suganuma

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

A specimen-cooling device has been designed, manufactured and integrated into a commercial ion-milling instrument for transmission electron microscopy. The instrument enables us to prepare section specimens of tin-plated Cu without forming intermetallic compound particles and/or voids. The results show that cooling of specimen during ion-milling process is necessary for fine structure investigations of low melting temperature materials.

Original languageEnglish
Pages (from-to)25-27
Number of pages3
JournalJournal of Electron Microscopy
Volume60
Issue number1
DOIs
Publication statusPublished - 2011 Feb

Keywords

  • Sn-plating
  • cooling stage
  • ion-milling

ASJC Scopus subject areas

  • Instrumentation

Fingerprint Dive into the research topics of 'Development of a cryogenic stage for an ion-milling instrument'. Together they form a unique fingerprint.

Cite this