Development of a compact X-ray source and super-sensitization of photo resists for soft x-ray imaging

Tomoko Gowa, Naoyuki Fukutake, Yoshimasa Hama, Kentaro Hizume, Takashi Kashino, Shigeru Kashiwagi, Ryunosuke Kuroda, Akihiko Masuda, Akihiro Oshima, Taku Saito, Kazuyuki Sakaue, Kunio Shinohara, Tomohiro Takahashi, Tatsuya Urakawa, Kiminori Ushida, Masakazu Washio

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Development of a compact X-ray source and super-sensitization of photo resists for soft x-ray imaging'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science