A compact magnetically expanding plasma source having a strong magnetic field is developed, where a pulsed solenoid current is provided by an insulated gate bipolar transistor switching circuit. The field strength is successfully increased up to ∼6 kG. The 13.56 MHz radio-frequency power with a pulse width of 28 ms and the operating argon pressure are maintained at 600 W and 3 mTorr, respectively. When the magnetic field strength is increased, the plasma density downstream of the source cavity increases due to the inhibition of cross-field diffusion and appears to saturate above ∼3.5 kG, while maintaining a plasma density of 5 × 1012 cm-3 within the source cavity.
ASJC Scopus subject areas
- Condensed Matter Physics