Development and prospects

Richard S. Muller; Wolfgang Menz; Masayoshi Esashi; Geoff Beardmore

doi:10.1007/978-3-642-18293-8_23

Development and prospects

Richard S. Muller, Wolfgang Menz, Masayoshi Esashi, Geoff Beardmore

Micro System Integration Center (μSIC)

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Abstract

This chapter includes 4 separate sections that were written by the prestigious scholars, Professor Richard S. Muller (University of California- Berkeley, USA), Professor Wolfgang Menz (University of Freiburg, Germany), Professor Masayoshi Esashi (Tohoku University, Japan), and Geoff Beardmore (Myraid Technology, UK). They shared their years of experience mainly in the development of MEMS and micro-nano technology, gave an overview of the history, development, and prospect of MEMS. Although from different perspectives, the prospect for MEMS is promising.

Original language	English
Title of host publication	Microsystems and Nanotechnology
Publisher	Springer-Verlag Berlin Heidelberg
Pages	899-929
Number of pages	31
Volume	9783642182938
ISBN (Electronic)	9783642182938
ISBN (Print)	3642182925, 9783642182921
DOIs	https://doi.org/10.1007/978-3-642-18293-8_23
Publication status	Published - 2012 Aug 1

Keywords

MEMS
development and prospects
micro-nano technology

ASJC Scopus subject areas

Engineering(all)
Biochemistry, Genetics and Molecular Biology(all)

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10.1007/978-3-642-18293-8_23

Cite this

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AU - Esashi, Masayoshi

AU - Beardmore, Geoff

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AB - This chapter includes 4 separate sections that were written by the prestigious scholars, Professor Richard S. Muller (University of California- Berkeley, USA), Professor Wolfgang Menz (University of Freiburg, Germany), Professor Masayoshi Esashi (Tohoku University, Japan), and Geoff Beardmore (Myraid Technology, UK). They shared their years of experience mainly in the development of MEMS and micro-nano technology, gave an overview of the history, development, and prospect of MEMS. Although from different perspectives, the prospect for MEMS is promising.

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Development and prospects

Abstract

Keywords

ASJC Scopus subject areas

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