Abstract
This chapter includes 4 separate sections that were written by the prestigious scholars, Professor Richard S. Muller (University of California- Berkeley, USA), Professor Wolfgang Menz (University of Freiburg, Germany), Professor Masayoshi Esashi (Tohoku University, Japan), and Geoff Beardmore (Myraid Technology, UK). They shared their years of experience mainly in the development of MEMS and micro-nano technology, gave an overview of the history, development, and prospect of MEMS. Although from different perspectives, the prospect for MEMS is promising.
Original language | English |
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Title of host publication | Microsystems and Nanotechnology |
Publisher | Springer-Verlag Berlin Heidelberg |
Pages | 899-929 |
Number of pages | 31 |
Volume | 9783642182938 |
ISBN (Electronic) | 9783642182938 |
ISBN (Print) | 3642182925, 9783642182921 |
DOIs | |
Publication status | Published - 2012 Aug 1 |
Keywords
- MEMS
- development and prospects
- micro-nano technology
ASJC Scopus subject areas
- Engineering(all)
- Biochemistry, Genetics and Molecular Biology(all)