Development and prospects

Richard S. Muller, Wolfgang Menz, Masayoshi Esashi, Geoff Beardmore

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

This chapter includes 4 separate sections that were written by the prestigious scholars, Professor Richard S. Muller (University of California- Berkeley, USA), Professor Wolfgang Menz (University of Freiburg, Germany), Professor Masayoshi Esashi (Tohoku University, Japan), and Geoff Beardmore (Myraid Technology, UK). They shared their years of experience mainly in the development of MEMS and micro-nano technology, gave an overview of the history, development, and prospect of MEMS. Although from different perspectives, the prospect for MEMS is promising.

Original languageEnglish
Title of host publicationMicrosystems and Nanotechnology
PublisherSpringer-Verlag Berlin Heidelberg
Pages899-929
Number of pages31
Volume9783642182938
ISBN (Electronic)9783642182938
ISBN (Print)3642182925, 9783642182921
DOIs
Publication statusPublished - 2012 Aug 1

Keywords

  • MEMS
  • development and prospects
  • micro-nano technology

ASJC Scopus subject areas

  • Engineering(all)
  • Biochemistry, Genetics and Molecular Biology(all)

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