Development and practical application of high-efficiency fire control system for the clean room

Soji Fukuda, Tadahiro Ohmi, Shigetoshi Sugawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

With the upsizing of wafers and substrates, the scale of clean room factories in the semiconductor/LCD industry is also expanding. Capital investment is as high as ¥500 billion (US$5 billion), boosting the asset value significantly. To secure a stable supply, suspension of production due to fire must never happen. The INERGEN gas fire control equipment [1], which sprays gas over the entire building to reduce the oxygen concentration to less than 15%, has been developed and installed at some universities and corporations. It is not harmful to people because there is carbon dioxide (CO2) in the gas to prevent breathing difficulties [2]. However, since the plant cost is enormous, it is suitable for relatively small facilities only. An efficient and low-cost system adopting Ar-CO2 gas has been newly developed for quickly extinguishing fires in large factories.

Original languageEnglish
Title of host publicationISSM 2006 Conference Proceedings - Fifteenth International Symposium on Semiconductor Manufacturing
Pages243-246
Number of pages4
DOIs
Publication statusPublished - 2006 Dec 1
EventISSM 2006 - 15th International Symposium on Semiconductor Manufacturing - Tokyo, Japan
Duration: 2007 Sep 252007 Sep 27

Publication series

NameIEEE International Symposium on Semiconductor Manufacturing Conference Proceedings
ISSN (Print)1523-553X

Other

OtherISSM 2006 - 15th International Symposium on Semiconductor Manufacturing
CountryJapan
CityTokyo
Period07/9/2507/9/27

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Engineering(all)
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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