Development and performance of a profilometer for measurement of mirror surface figure

H. Sugawara, Mihiro Yanagihara, S. Asaoka, M. Okusawa, H. Maezawa

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A profilometer has been developed to measure quantitatively the surface figures of optical elements. It consists of a He-Ne laser source and a position-sensitive detector mounted on stepper-motor-driven platforms. Its application has been made successfully to the estimate of changes in the surface slope and figure of a SiC mirror exposed to high power synchrotron radiation.

Original languageEnglish
Pages (from-to)485-488
Number of pages4
JournalJournal of Electron Spectroscopy and Related Phenomena
Volume80
DOIs
Publication statusPublished - 1996 Jan 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Radiation
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Spectroscopy
  • Physical and Theoretical Chemistry

Fingerprint Dive into the research topics of 'Development and performance of a profilometer for measurement of mirror surface figure'. Together they form a unique fingerprint.

  • Cite this