Development and application of micro-beam nuclear reaction analysis for observation of hydrogen distribution

Daiichiro Sekiba, Hiroki Yonemura, Takuya Nebiki, Syouhei Ogura, Markus Wilde, Masuaki Matsumoto, Tatsuo Okano, Jirouta Kasagi, Tadashi Narusawa, Shizuma Kuribayashi, Yasuhiro Iwamura, Takehiko Ito, Hiroyuki Matsuzaki, Katsuyuki Fukutani

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


A microscope for hydrogen has been developed by means of micro-beam nuclear reaction analysis. The resonance nuclear reaction between proton and 15N accelerated up to ∼6 MeV is used. The micro-beam of 15N ion was made by a glass capillary, which has a taper shape. Against this focused 15N ion beam, samples are scanned perpendicularly to the beam direction by stepping motors. As an application of the microscope, a patterned Y thin film covered by Pd thin film was prepared, and the sample was exposed to 1 atm hydrogen atmosphere over a night. The hydrogen distribution in this sample was investigated by using a glass capillary, which has an exit with the 50 μm diameter. As a result, a profile of nuclear reaction analysis, indicating that the hydrogen atoms are concentrated in the patterned Y thin films, was taken.

Original languageEnglish
Pages (from-to)574-578
Number of pages5
JournalShinku/Journal of the Vacuum Society of Japan
Issue number9
Publication statusPublished - 2007
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering


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