Abstract
In an r.f. glow-discharge plasma, a d.c. bias current can be introduced by connecting an electric circuit comprising a low-pass filter and a variable resistor. The bias current promotes the emission excitations in the plasma, leading to an improvement of the detection power in the optical emission spectrometry. By conducting a bias current of 27mA, the emission intensities of atomic resonance lines were several times larger than those obtained with conventional r.f.-powered plasmas. The detection limits for determination of alloyed elements in Fe-based low alloyed standard samples were estimated to be 3 ppm Cu for Cu I 324.75 nm, 10 ppm Ni for Ni I 352.45 nm, 6 ppm Ti for Ti I 364.267 nm, and 7 ppm B for B I 208.96 nm.
Original language | English |
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Pages (from-to) | 65-68 |
Number of pages | 4 |
Journal | Tetsu-To-Hagane/Journal of the Iron and Steel Institute of Japan |
Volume | 91 |
Issue number | 5 |
DOIs | |
Publication status | Published - 2005 May |
Keywords
- Conduction of a d.c. bias current
- Detection limit
- Optical emission spectrometry
- Radio-frequency-powered glow discharge plasma
- Self-bias voltage
ASJC Scopus subject areas
- Condensed Matter Physics
- Physical and Theoretical Chemistry
- Metals and Alloys
- Materials Chemistry