TY - JOUR
T1 - Determination of Trace Amounts of Boron in Silicon and Germanium by Curcumin Spectrophotometry after Methyl Borate Distillation
AU - Ishikuro, Mikio
AU - Wagatsuma, Kazuaki
N1 - Copyright:
Copyright 2010 Elsevier B.V., All rights reserved.
PY - 2009
Y1 - 2009
N2 - A high-sensitivity, high-precision analytical method was developed to determine trace amounts of boron in silicon or germanium semiconductor materials. Silicon was dissolved with a mixture of hydrofluoric acid and nitric acid, while germanium was dissolved with aqua regia. In order to prevent boron from being vaporized by heating in hydrofluoric acid, phosphoric acid and sulfuric acid were added to the solution. After the sample solution was thoroughly dehydrated by heating, silicon was vaporized as SiF4; however, germanium remained as a white precipitate (GeO2). By the addition of methyl alcohol to the dehydrated sample solution and subsequently heating it, boron could be separated as methyl borate from the sample solution. The resulting methyl borate was absorbed in a sodium hydroxide solution, and then boron was determined by a curcumin spectrophotometric method. The recoveries of boron after distillation were almost 100% in both silicon and germanium. The detection limit of boron was 0.1 ppm in silicon and germanium.
AB - A high-sensitivity, high-precision analytical method was developed to determine trace amounts of boron in silicon or germanium semiconductor materials. Silicon was dissolved with a mixture of hydrofluoric acid and nitric acid, while germanium was dissolved with aqua regia. In order to prevent boron from being vaporized by heating in hydrofluoric acid, phosphoric acid and sulfuric acid were added to the solution. After the sample solution was thoroughly dehydrated by heating, silicon was vaporized as SiF4; however, germanium remained as a white precipitate (GeO2). By the addition of methyl alcohol to the dehydrated sample solution and subsequently heating it, boron could be separated as methyl borate from the sample solution. The resulting methyl borate was absorbed in a sodium hydroxide solution, and then boron was determined by a curcumin spectrophotometric method. The recoveries of boron after distillation were almost 100% in both silicon and germanium. The detection limit of boron was 0.1 ppm in silicon and germanium.
KW - Curcumin spectrophotometry
KW - Germanium
KW - Methyl borate distillation
KW - Silicon
KW - Trace amounts of boron
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U2 - 10.2116/bunsekikagaku.58.373
DO - 10.2116/bunsekikagaku.58.373
M3 - Article
AN - SCOPUS:72149119706
VL - 58
SP - 373
EP - 377
JO - Bunseki Kagaku
JF - Bunseki Kagaku
SN - 0525-1931
IS - 5
ER -