Determination of the thickness of a covering layer on a solid by Auger and electron energy-loss spectra without a standard sample

Masaoki Oku; Shigeru Suzuki; Kenji Abiko; Hiroshi Kimura; Kichinosuke Hirokawa

doi:10.1016/0368-2048(81)80031-X

Determination of the thickness of a covering layer on a solid by Auger and electron energy-loss spectra without a standard sample

Masaoki Oku, Shigeru Suzuki, Kenji Abiko, Hiroshi Kimura, Kichinosuke Hirokawa

Micro System Integration Center (μSIC)

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

A semi-quantitative method is proposed for determining the thickness of a covering layer on a solid. The thickness is calculated from the intensity ratios between Auger electron spectra (AES) and core-electron energy-loss spectra (ELS) for the uncovered and covered surfaces. This method needs no standard sample or ion sputtering to estimate the thickness, although it involves a number of assumptions. It has been applied to the determination of the thickness of segregated phosphorus layers on intergranular fracture planes of FeP alloys, using a cylindrical-mirror electron analyzer.

Original language	English
Pages (from-to)	147-156
Number of pages	10
Journal	Journal of Electron Spectroscopy and Related Phenomena
Volume	23
Issue number	2
DOIs	https://doi.org/10.1016/0368-2048(81)80031-X
Publication status	Published - 1981 Jan 1

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Radiation
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Spectroscopy
Physical and Theoretical Chemistry

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Determination of the thickness of a covering layer on a solid by Auger and electron energy-loss spectra without a standard sample. / Oku, Masaoki; Suzuki, Shigeru; Abiko, Kenji; Kimura, Hiroshi; Hirokawa, Kichinosuke.

In: Journal of Electron Spectroscopy and Related Phenomena, Vol. 23, No. 2, 01.01.1981, p. 147-156.

Research output: Contribution to journal › Article › peer-review

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AU - Hirokawa, Kichinosuke

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Determination of the thickness of a covering layer on a solid by Auger and electron energy-loss spectra without a standard sample

Abstract

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